S. T. Tseng

Publication Activity (10 Years)

Years Active: 2008-2008
Publications (10 Years): 0

Publications

An-Guo Chao, S. T. Tseng, David Shan-Hill Wong, Shi-Shang Jang, Shui-Pin Lee
Systematic applications of multivariate analysis to monitoring of equipment health in semiconductor manufacturing. WSC (2008)