Timing analysis and optimization implications of bimodal CD distribution in double patterning lithography.

Kwangok Jeong Andrew B. Kahng

Published in: ASP-DAC (2009)

Keyphrases

optimization algorithm
global optimization
joint optimization
case study
power law
probability distribution
optimization problems
uniformly distributed
random variables
combinatorial optimization
discrete optimization
artificial intelligence
spatial distribution
markov chain
multiscale
website
feature selection