Corrigendum to "Defective wafer detection using a denoising autoencoder for semiconductor manufacturing processes" [Adv. Eng. Informat. 46 (2020) 101166].
Shu-Kai S. FanChia-Yu HsuChih-Hung JenKuan-Lung ChenLi-Ting JuanPublished in: Adv. Eng. Informatics (2020)