MEMS components with perfectly protected edges and corners in Si{110} wafers.

Prem Pal Kazuo Sato Hirotaka Hida

Published in: MHS (2011)

Keyphrases

integrated circuit
building blocks
corner detection
search engine
image processing
database
straight edges
directed graph
software components
image structure
edge map
corner points
directed edges
step edges
semiconductor manufacturing
directed acyclic graph
random walk
scale space