Robust nonlinear perfect control for semiconductor refrigeration device.

Dongyun Wang Aihui Wang Yiwen Fu Junming Xiao Huiqin Liu

Published in: SKIMA (2016)

Keyphrases

tracking control
data acquisition
control system
highly nonlinear
real time
computationally efficient
adaptive neural
genetic algorithm
process control
stability analysis
force feedback
semiconductor manufacturing
model predictive control