A Spatio-Temporal Fuzzy Logic System for Process Control.
Han-Xiong LiXiao-Gang DuanPublished in: SMC (2009)
Keyphrases
- process control
- fuzzy logic
- spatio temporal
- control system
- intelligent control
- spatial and temporal
- semiconductor manufacturing
- fuzzy logic control
- fuzzy membership functions
- product quality
- fuzzy sets
- computational intelligence
- manufacturing process
- soft computing
- space time
- neural network
- genetic algorithm
- pid controller
- expert systems
- image sequences
- spatio temporal databases
- control algorithm
- spatio temporal data
- artificial intelligence
- moving objects
- control strategy
- rule base
- neural networks and genetic algorithms
- fuzzy controller
- fuzzy control
- fuzzy inference system
- decision making
- spatio temporal patterns
- control charts
- membership functions
- back propagation
- image derivatives
- spatio temporally
- fuzzy reasoning
- fuzzy inference
- spatial temporal
- human actions
- fuzzy rules
- rough sets
- multimedia
- data mining