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Improvement on sheet resistance uniformity of nickel silicide by optimization of silicidation conditions.
Ryuji Tomita
Hidehiko Kimura
M. Yasuda
K. Maeda
S. Ueno
T. Tonegawa
T. Fujimoto
M. Moritoki
Hiroshi Iwai
Published in:
Microelectron. Reliab. (2013)
Keyphrases
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optimization problems
sufficient conditions
optimization process
optimization model
joint optimization
discrete optimization
data sets
decision trees
expert systems
linear programming
global optimization
optimization methods
optimal design