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Criticality Measures for Time Constraint Tunnels in Semiconductor Manufacturing.
Benjamin Anthouard
Valeria Borodin
Stéphane Dauzère-Pérès
Quentin Christ
Renaud Roussel
Published in:
WSC (2022)
Keyphrases
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semiconductor manufacturing
discrete event simulation
process control
production system
data sets
data mining
information retrieval
expert systems
evaluation measures
penalty function
constraint solving
quantitative measures
complexity measures