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Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures.

Juan RenMichael WardPeter KinnellRussell CraddockXueyong Wei
Published in: Sensors (2016)
Keyphrases
  • wide range
  • low cost
  • image registration
  • high speed
  • space charge
  • deformable objects