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A study on the optimization of wafer pre-treatment conditions for thin film stability monitor.

Taicheng Kevin GongYanju Lisa YuYan Kaily CaoXueliang Ruben ZhangKaiyuan Kevin ChangWei-Ting Kary Chien
Published in: IEEM (2014)
Keyphrases
  • thin film
  • real time
  • optimization problems
  • optimization algorithm
  • database
  • decision making
  • wireless sensor networks
  • sufficient conditions