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Fabrication and characterization of Ti/TiN- based resistance temperature detector.

Walid FilaliHadjira HaridiElyes GaroudjaMohamed BoubaayaAbdelkrim El Hadi KhediriMohamed MekheldiLaid HenniFouaz LekouiRouabeh HamzaRachid AmraniSlimane Oussalah
Published in: SSD (2023)
Keyphrases
  • high density
  • integrated circuit
  • high speed
  • room temperature
  • detection method
  • multiscale
  • multiresolution
  • power system
  • heat flow