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A framework for standard modular simulation in semiconductor wafer fabrication systems.
José A. Ramírez-Hernández
Heshan Li
Emmanuel Fernandez
Charles R. McLean
Swee Leong
Published in:
WSC (2005)
Keyphrases
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wafer fabrication
main contribution
management system
expert systems
learning systems
neural network
data mining
artificial intelligence
intelligent systems
knowledge based systems
lightweight
database
complex systems
retrieval systems
mathematical models
simulation environment
simulation models
modular structure