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Full Fabrication Simulation of 300mm Wafer Focused on AMHS (Automated Material Handling Systems).

Youngshin HanDongsik ParkSangwon ChaeChilgee Lee
Published in: AsiaSim (2004)
Keyphrases
  • material handling
  • integrated circuit
  • knowledge base
  • knowledge based systems
  • high density
  • vision system