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Discrete Wavelet Transform and Radial Basis Neural Network for Semiconductor Wet-Etching Fabrication Flow-Rate Analysis.
Wen-Ren Yang
Published in:
IEEE Trans. Instrum. Meas. (2012)
Keyphrases
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discrete wavelet transform
radial basis
neural network
multiresolution
back propagation
wavelet domain
image fusion
probabilistic neural network
plasma etching
machine learning
fuzzy logic
image analysis
wavelet coefficients
high frequency
low frequency