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Active fault tolerant control for high-precision positioning of a non-contact mode uncertain atomic force microscopy.
Meric Cetin
Selami Beyhan
Published in:
Trans. Inst. Meas. Control (2020)
Keyphrases
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high precision
atomic force microscopy
fault tolerant control
high recall
control system
high reliability
nonlinear systems
stability analysis
decision making
control scheme
achieve high precision
control law
pattern recognition
high accuracy
multi modal
error rate