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Using neural networks to control the process of plasma etching and deposition.
Gamze Erten
Ammar B. A. Gharbi
Fathi M. A. Salam
Timothy A. Grotjohn
Jes Asmussen
Published in:
ICNN (1996)
Keyphrases
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neural network
plasma etching
genetic algorithm
artificial intelligence
process control
control structure
database
machine learning
pattern recognition
data acquisition
optimal control
training process
thin film
control charts