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Micro-Raman spectroscopy applied in crystal structure analysis on the ESD failure mechanism of SiC JBS diodes.
Yunpeng Jia
Zhenhua Lin
Dongqing Hu
Yu Wu
Peng Li
Guanghai Liu
Published in:
Microelectron. Reliab. (2018)
Keyphrases
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real time
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x ray
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structural information
high density
failure prediction