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Iterative Learning Control for waferstage positioning based on orthogonal projection.

Sandipan MishraMasayoshi Tomizuka
Published in: CDC (2007)
Keyphrases
  • iterative learning control
  • orthogonal projection
  • iterative learning
  • intelligent control
  • exact solution
  • hilbert space
  • pattern recognition
  • neural network
  • machine learning
  • computer vision