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A Capacitively Transduced Bulk Acoustic Wave MEMS Resonator with Low Bias Voltages.
Zeji Chen
Qianqian Jia
Wenli Liu
Yinfang Zhu
Quan Yuan
Jinling Yang
Fuhua Yang
Published in:
NEMS (2021)
Keyphrases
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multiscale
variance reduction
electric field
source localization
data sets
neural network
real world
machine learning
artificial intelligence
knowledge base
pattern recognition
sensor networks
fault diagnosis
highly correlated