Optical-Interferometry-Based CMOS-MEMS Sensor Transduced by Stress-Induced Nanomechanical Deflection.
Satoshi MaruyamaTakeshi HizawaKazuhiro TakahashiKazuaki SawadaPublished in: Sensors (2018)
Keyphrases
- image sensor
- analog to digital converter
- focal plane
- cmos image sensor
- solid state
- image capture
- imaging sensors
- dynamic range
- digital camera
- video camera
- infrared
- electro optical
- high speed
- low power
- charge coupled device
- single chip
- fiber optic
- imaging systems
- real time
- sensor data
- low cost
- rolling shutter
- sensor technology
- motion blur
- magneto optic
- sensor networks
- circuit design
- field of view
- power consumption
- data acquisition
- phase shifting
- vlsi circuits
- cmos technology
- phase unwrapping
- three dimensional