Fabrication and Characterization of a CMOS-MEMS Humidity Sensor.
John Ojur DennisAbdelaziz Yousif AhmedMohd Haris M. KhirPublished in: Sensors (2015)
Keyphrases
- analog to digital converter
- high speed
- image sensor
- data acquisition
- cmos image sensor
- monitoring system
- low cost
- sensor data
- silicon on insulator
- sensor networks
- integrated circuit
- low power
- real time
- high density
- power consumption
- multi sensor
- energy consumption
- dynamic range
- power supply
- single chip
- focal plane
- neural network
- high sensitivity
- semiconductor devices
- data sets
- image processing
- delay insensitive
- contact force
- sensor fusion
- parallel processing