CMOs interface circuitry for a closed-loop capacitive MEMS accelerometer.

Yuntao Liu Xiaowei Liu Liang Yin Weiping Chen Qun Wu

Published in: NEMS (2009)

Keyphrases

closed loop
open loop
circuit design
control system
control law
control scheme
feedback control
parameter identification
feedback controller
asymptotic stability
pid controller
image sensor
control loop
force control
trajectory tracking
focal plane
vision system