Time Series Fault Prediction in Semiconductor Equipment Using Recurrent Neural Network.
Javeria Muhammad NawazMuhammad Zeeshan ArshadSang Jeen HongPublished in: ISNN (2) (2013)
Keyphrases
- recurrent neural networks
- chaotic time series
- echo state networks
- neural network
- feed forward
- long short term memory
- reservoir computing
- recurrent networks
- complex valued
- artificial neural networks
- hidden layer
- dynamic time warping
- semiconductor manufacturing
- feedforward neural networks
- non stationary
- hebbian learning
- neural model
- stock market
- artificial intelligence
- machine learning
- nonlinear dynamic systems