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Application of Scanning Microwave Microscopy nano-C-V to investigate dopant defect under a poly gate device.

Oskar AmsterK. A. RubinY. YangD. IyerArron Messinger
Published in: Microelectron. Reliab. (2018)
Keyphrases
  • nano scale
  • decision support
  • image analysis
  • database
  • real time
  • data sets
  • real world
  • information retrieval
  • computer vision
  • information systems
  • video sequences
  • machine vision
  • structured light