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Development of a Digital-Convolution-Based Process Emulator for Three-Dimensional Microstructure Fabrication Using Electron-Beam Lithography.
Hsiu-Ming Yeh
Kuo-Shen Chen
Published in:
IEEE Trans. Ind. Electron. (2009)
Keyphrases
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three dimensional
development process
software engineering
case study
electron beam lithography
learning environment
development environment
data sets
image processing
medical images
process model
digital technologies