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Design, Fabrication and Characterization of a MEMS-Based Three-Dimensional Electric Field Sensor with Low Cross-Axis Coupling Interference.

Biyun LingChunrong PengRen RenZhaozhi ChuZhouwei ZhangHucheng LeiShanhong Xia
Published in: Sensors (2018)
Keyphrases
  • three dimensional
  • electric field
  • design process
  • design space
  • real time
  • range images
  • engineering design
  • cross section
  • knowledge based systems