Squeeze Film Effect in Surface Micromachined Nano Ultrasonic Sensor for Different Diaphragm Displacement Profiles.
Avik Ghosh DastidarReshmi MaityRamesh Chandra TiwariDejan VidojevicTijana S. KevkicVojkan NikolicSubhajit DasNiladri Pratap MaityPublished in: Sensors (2023)