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Squeeze Film Effect in Surface Micromachined Nano Ultrasonic Sensor for Different Diaphragm Displacement Profiles.

Avik Ghosh DastidarReshmi MaityRamesh Chandra TiwariDejan VidojevicTijana S. KevkicVojkan NikolicSubhajit DasNiladri Pratap Maity
Published in: Sensors (2023)
Keyphrases
  • sensor networks
  • d objects
  • sensor data
  • three dimensional
  • surface reconstruction
  • multi sensor
  • surface fitting
  • real time
  • x ray
  • data acquisition
  • nano scale