Real-time estimation and control of photoresist properties in microlithography.

Xiaodong Wu Arthur Tay Weng Khuen Ho Kok Kiong Tan

Published in: CCA (2007)

Keyphrases

real time
control system
real time control
data acquisition
control loop
parameter estimation
optimal control
low cost
high speed
website
information systems
estimation algorithm
control problems
computer vision
data mining
control signals
vision system
database
structural properties
accurate estimation
control theory