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Optimization of SiON/SiOx structures fabrication process for optical waveguides.

L'ubos PodluckýMarián VojsJozef ChovanVlastimil RehácekJaroslav KovácFrantisek Uherek
Published in: RADIOELEKTRONIKA (2020)
Keyphrases
  • optimization process
  • real time
  • expert systems
  • artificial neural networks
  • databases
  • artificial intelligence
  • feature selection
  • optimal solution
  • global optimization
  • high density
  • long period