Bilinear Lithography Hotspot Detection.
Hang ZhangFengyuan ZhuHaocheng LiEvangeline F. Y. YoungBei YuPublished in: ISPD (2017)
Keyphrases
- automatic detection
- detection method
- detection rate
- detection algorithm
- detection accuracy
- event detection
- early warning
- false alarms
- database systems
- false positives
- object detection
- oil spill
- machine learning
- anomaly detection
- multi class
- singular value decomposition
- expert systems
- data structure
- knowledge base
- artificial intelligence
- genetic algorithm
- piecewise linear
- detection scheme
- neural network