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Error Calibration Method Based on Perspective Mapping for Wafer Automatic Optical Inspection System.

Chao MengJinfei ShiFei HaoPanyu Li
Published in: IEEE Trans. Instrum. Meas. (2022)
Keyphrases
  • calibration method
  • camera calibration
  • fish eye lenses
  • multi camera
  • field of view
  • structured light
  • viewpoint
  • three dimensional
  • printed circuit boards
  • calibration procedure
  • image sequences
  • state space
  • focal length