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Microscale temperature sensing using novel reliable silicon vertical microprobe array: Computation and experiment.
M. A. Matin
A. Ikedo
Takeshi Kawano
K. Sawada
Makoto Ishida
Published in:
Microelectron. Reliab. (2015)
Keyphrases
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sensor networks
high density
low cost
high speed
cost effective
data sets
neural network
information systems
data structure