Two-level BEOL processing for rapid iteration in MRAM development.

Michael C. Gaidis Eugene J. O'Sullivan Janusz Jozef Nowak Yu Lu Sivananda K. Kanakasabapathy Philip Louis Trouilloud Daniel Christopher Worledge Solomon Assefa Keith R. Milkove George P. Wright William J. Gallagher

Published in: IBM J. Res. Dev. (2006)

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