Two-level BEOL processing for rapid iteration in MRAM development.
Michael C. GaidisEugene J. O'SullivanJanusz Jozef NowakYu LuSivananda K. KanakasabapathyPhilip Louis TrouilloudDaniel Christopher WorledgeSolomon AssefaKeith R. MilkoveGeorge P. WrightWilliam J. GallagherPublished in: IBM J. Res. Dev. (2006)