A practical view of stability analysis in discrete event dynamic systems: a case study on plasma etching system.
Kwang-Hyun ChoJong-Tae LimPublished in: SMC (1998)
Keyphrases
- dynamic systems
- discrete event
- stability analysis
- complex systems
- nonlinear systems
- discrete event simulation
- qualitative reasoning
- dynamical systems
- plasma etching
- consistency based diagnosis
- state variables
- simulation model
- model based diagnosis
- neural network
- fuzzy model
- mathematical model
- particle filter
- qualitative models
- cooperative
- multi agent
- ordinary differential equations
- bayesian networks
- low density
- decision making
- linear time invariant
- genetic algorithm