An optimal OHT dispatching system for 300 mm semiconductor manufacturing.

Chung-Yang Liu Da-Yin Liao

Published in: SMC (2) (2004)

Keyphrases

semiconductor manufacturing
discrete event simulation
process control
data sets
scheduling problem
dynamic programming
worst case
finding optimal
optimal solution
knowledge base
database
closed form
special case
flexible manufacturing systems
genetic algorithm
maximum error
rms error