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Simultaneous EUV Flare Variation Minimization and CMP Control by Coupling-Aware Dummification.

Hui-Ju Katherine ChiangChi-Yuan LiuJie-Hong R. JiangYao-Wen Chang
Published in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2016)
Keyphrases
  • control system
  • control theory
  • objective function
  • control method
  • data sets
  • search algorithm
  • databases
  • neural network
  • bayesian networks
  • artificial neural networks
  • hidden markov models
  • adaptive control