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A Low-Cost, Normally Closed, Solenoid Valve for Non-Contact Dispensing in the Sub-µL Range.
Stefan Borja Bammesberger
Sabrina Kartmann
Laurent Tanguy
Dong Liang
Klaus Mutschler
Andreas Ernst
Roland Zengerle
Peter Koltay
Published in:
Micromachines (2013)
Keyphrases
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low cost
real time
wide range
low power
highly efficient
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