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Determination of migration effects in Cu-via structures with respect to process-induced stress.

Kirsten Weide-ZaageJiani ZhaoJoharsyah CiptokusumoOliver Aubel
Published in: Microelectron. Reliab. (2008)
Keyphrases
  • neural network
  • wide range
  • process model
  • data structure
  • expert systems
  • evolutionary algorithm
  • special case