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The realization of ZrOxNy temperature sensors with good sensitivity and stability in the temperature range above 150K.
Yanjie Li
Minmin You
Xun Gong
Xiu-Yan Li
Zude Lin
Jingquan Liu
Published in:
NEMS (2021)
Keyphrases
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wide range
sensitivity analysis
databases
stability analysis
real time
image processing
three dimensional
bayesian networks
high sensitivity
solar radiation
heat flow