Laser ReSeal - Combination of Accelerometer and Gyroscope Sensors in a Single MEMS Chip Silicon Wafer Processing Technology for Six Degrees of Freedom in Inertial Sensors.
Holger RumpfJens FreyKurt-Ulrich RitzauAchim BreitlingPeter StaffeldMawuli AmetowoblaPublished in: IEEE SENSORS (2020)
Keyphrases
- inertial measurement unit
- inertial sensors
- position and orientation
- low cost
- sensor fusion
- cmos technology
- high speed
- real time
- metal oxide semiconductor
- motion tracking
- motion sequences
- visual odometry
- degrees of freedom
- integrated circuit
- feature tracking
- extended kalman filter
- silicon on insulator
- image sensor
- pose estimation
- mobile robot
- motion analysis
- monitoring system
- infrared
- computer vision