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Parametric defect localization on integrated circuits - From static laser stimulation to real-time variation mapping (RTVM).

Luc Saury
Published in: Microelectron. Reliab. (2014)
Keyphrases
  • integrated circuit
  • real time
  • control system
  • vision system
  • low cost
  • human retina
  • loop closing
  • computer vision
  • image sequences
  • feature extraction
  • efficient implementation
  • real time systems
  • electron beam