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Data-Driven Modeling Using System Integration Scaling Factors and Positioning Performance of an Exposure Machine System.

Jinn-Tsong TsaiCheng-Chung ChangWen-Ping ChenJyh-Horng Chou
Published in: IEEE Access (2017)
Keyphrases
  • data driven
  • scaling factors
  • control parameters
  • reinforcement learning
  • control system
  • global optimization
  • dynamic model
  • approximation error