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Data-Driven Modeling Using System Integration Scaling Factors and Positioning Performance of an Exposure Machine System.
Jinn-Tsong Tsai
Cheng-Chung Chang
Wen-Ping Chen
Jyh-Horng Chou
Published in:
IEEE Access (2017)
Keyphrases
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data driven
scaling factors
control parameters
reinforcement learning
control system
global optimization
dynamic model
approximation error