Grain Size Reduction of Ferroelectric HZO Enabled by a Novel Solid Phase Epitaxy (SPE) Approach: Working Principle, Experimental Demonstration, and Theoretical Understanding.
Dong ZhangJixuan WuQiwen KongZuopu ZhouLong LiuKaizhen HanChen SunXiaolin WangGan LiuLeming JiaoZijie ZhengYuye KangJiezhi ChenXiao GongPublished in: VLSI Technology and Circuits (2023)