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Reliability improvement of high value doped polysilicon-based resistors.
E. Carvou
F. Le Bihan
Anne Claire Salaün
R. Rogel
Olivier Bonnaud
Yannick Rey-Tauriac
Xavier Gagnard
L. Roland
Published in:
Microelectron. Reliab. (2002)
Keyphrases
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random access memory
high efficiency
integrated circuit