Online Management and Control System for growing of monocrystal semiconductor materials in multi-zone furnaces.
Dirk BräuerAndreas RehkopfPublished in: ETFA (2008)
Keyphrases
- control system
- real time
- online learning
- management system
- control strategy
- fuzzy logic
- data management
- closed loop
- control algorithm
- decision making
- expert systems
- neural network
- decision support
- semiconductor manufacturing
- process control
- plasma etching
- database
- online environment
- real environment
- pid controller
- information management
- steady state