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Electron Beam Probing - A Solution for MCM Test and Failure Analysis.

Ralf SchmidReinhold SchmittMatthias BrunnerOliver GessnerMatthias Sturm
Published in: J. Electron. Test. (1997)
Keyphrases
  • electron beam
  • image analysis
  • case study
  • three dimensional
  • optimal solution
  • statistical analysis
  • integrated circuit