A Fault-Tolerant Multiple Processor for Front-End Process Control.

K. Chmillon J. Heger H. Herzberger

Published in: Fehlertolerierende Rechensysteme (1987)

Keyphrases

fault tolerant
process control
fault tolerance
distributed systems
control system
state machine
semiconductor manufacturing
load balancing
intelligent control
manufacturing process
artificial intelligence
high availability
product quality
back end
fuzzy logic
real time
fault isolation
safety critical