Fabrication of movable microstructure integrated with Vorticella actuator.

Moeto Nagai Kei Kato Takahiro Kawashima Takayuki Shibata

Published in: MHS (2013)

Keyphrases

integrated circuit
high density
control system
high speed
control method
real world
artificial intelligence
metadata
image processing
case study
database systems
high resolution
integrating multiple