Login / Signup
Measuring Photolithographic Overlay Accuracy and Critical Dimensions by Correlating Binarized Laplacian of Gaussian Convolutions.
H. Keith Nishihara
P. A. Crossley
Published in:
IEEE Trans. Pattern Anal. Mach. Intell. (1988)
Keyphrases
</>
high accuracy
prediction accuracy
computational cost
computational efficiency
highly accurate
generalized gaussian
edge detection
maximum likelihood
error rate
document images
data sets
feature extraction
input image