Closed-loop voltage control of a parallel-plate MEMS electrostatic actuator.
Lili DongJason EdwardsPublished in: ACC (2010)
Keyphrases
- closed loop
- open loop
- control system
- feedback control
- control loop
- control law
- guaranteed cost
- trajectory tracking
- control scheme
- disturbance rejection
- electric field
- parameter identification
- dc motor
- reference trajectory
- force control
- feedback controller
- induction motor
- position control
- pid controller
- adaptive fuzzy
- external disturbances
- control theory
- inverted pendulum
- process control
- control method
- fuzzy logic
- linear quadratic
- fuzzy control
- asymptotic stability
- control strategy
- parameter uncertainties
- robotic manipulator
- adaptive control
- neural network controller
- controller design
- visual servoing
- tracking error
- master slave
- real time
- operating conditions
- optimal control